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sorry im only getting back to you a year later. I haven't tried photolithography yet either, but I'd like to. I did try this thing where you use a laser engraver to etch a pattern on Kapton tape to make capacitors. worked pretty well. I think it could be possible to make other electronic components that way too. It's because the Kapton tape for some reason oxidizes into graphene when you hit it with the laser.
do you have access to a big-boy laser or are you using something a little more accessible? this is so cool
it's not really big big boy laser it's a 5W laser engraver. it won't cut wood but it will engrave on it. I have to dial it back a little to not burn through the tape.